dc.contributor.author | Ciesielski, Richard | |
dc.contributor.author | Saadeh, Qais | |
dc.contributor.author | Philipsen, Vicky | |
dc.contributor.author | Opsomer, Karl | |
dc.contributor.author | Soulie, Jean-Philippe | |
dc.contributor.author | Wu, Meiyi | |
dc.contributor.author | Naujok, Philipp | |
dc.contributor.author | van de Kruijs, Robbert W. E. | |
dc.contributor.author | Detavernier, Christophe | |
dc.contributor.author | Kolbe, Michael | |
dc.contributor.author | Scholze, Frank | |
dc.contributor.author | Soltwisch, Victor | |
dc.date.accessioned | 2022-04-05T09:35:25Z | |
dc.date.available | 2022-03-26T02:08:25Z | |
dc.date.available | 2022-03-28T11:54:16Z | |
dc.date.available | 2022-04-05T09:35:25Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 1559-128X | |
dc.identifier.other | WOS:000767047200031 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39535.3 | |
dc.source | WOS | |
dc.title | Determination of optical constants of thin films in the EUV | |
dc.type | Journal article | |
dc.contributor.imecauthor | Philipsen, Vicky | |
dc.contributor.imecauthor | Opsomer, Karl | |
dc.contributor.imecauthor | Soulie, Jean-Philippe | |
dc.contributor.imecauthor | Wu, Meiyi | |
dc.contributor.orcidimec | Philipsen, Vicky::0000-0002-2959-432X | |
dc.contributor.orcidimec | Soulie, Jean-Philippe::0000-0002-5956-6485 | |
dc.date.embargo | 2022-03-31 | |
dc.identifier.doi | 10.1364/AO.447152 | |
dc.source.numberofpages | 19 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 2060 | |
dc.source.endpage | 2078 | |
dc.source.journal | APPLIED OPTICS | |
dc.identifier.pmid | MEDLINE:35297898 | |
dc.source.issue | 8 | |
dc.source.volume | 61 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | Horizon 2020 Framework Programme (20IND04, 662338, 783247). | |