dc.contributor.author | Poonkottil, Nithin | |
dc.contributor.author | Minjauw, Matthias M. | |
dc.contributor.author | Werbrouck, Andreas | |
dc.contributor.author | Checchia, Stefano | |
dc.contributor.author | Solano, Eduardo | |
dc.contributor.author | Nisula, Mikko | |
dc.contributor.author | Franquet, Alexis | |
dc.contributor.author | Detavernier, Christophe | |
dc.contributor.author | Dendooven, Jolien | |
dc.date.accessioned | 2023-01-04T11:12:06Z | |
dc.date.available | 2022-10-12T02:49:49Z | |
dc.date.available | 2022-10-19T14:03:33Z | |
dc.date.available | 2023-01-04T11:12:06Z | |
dc.date.issued | 2022-09-21 | |
dc.identifier.issn | 0897-4756 | |
dc.identifier.other | WOS:000861669700001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40554.3 | |
dc.source | WOS | |
dc.title | Atomic Layer Deposition of Ruthenium Dioxide Based on Redox Reactions between Alcohols and Ruthenium Tetroxide | |
dc.type | Journal article | |
dc.contributor.imecauthor | Franquet, Alexis | |
dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
dc.date.embargo | 2023-09-21 | |
dc.identifier.doi | 10.1021/acs.chemmater.2c02292 | |
dc.source.numberofpages | 13 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 8946 | |
dc.source.endpage | 8958 | |
dc.source.journal | CHEMISTRY OF MATERIALS | |
dc.source.issue | 19 | |
dc.source.volume | 34 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | This project has received funding from the European Union's Horizon 2020 research and innovation program under the Marie Sklodowska-Curie grant agreement no. 765378. The authors would like to acknowledge Air Liquide for supplying the ToRuS precursor. We thank Ranjith. K. Ramachandran for useful discussions. M.M.M. and A.W. would like to thank the Flemish Research Foundation (FWO-Vlaanderen) . The Special Research Fund BOF of Ghent University (GOA 01G01513) is also acknowledged. Dr. Alexander Merkulov is thanked for performing the SIMS measurements. The ESRF is acknowledged for provision of beamtime under proposal number MA-4987 (doi.esrf.fr/10.15151/ESRF-ES-538779994) . The GIWAXS experiments were performed at the NCD-SWEET beamline at ALBA Synchrotron with the collaboration of ALBA staff. | |