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Atomic Layer Deposition of Ruthenium Dioxide Based on Redox Reactions between Alcohols and Ruthenium Tetroxide
dc.contributor.author | Poonkottil, Nithin | |
dc.contributor.author | Minjauw, Matthias M. | |
dc.contributor.author | Werbrouck, Andreas | |
dc.contributor.author | Checchia, Stefano | |
dc.contributor.author | Solano, Eduardo | |
dc.contributor.author | Nisula, Mikko | |
dc.contributor.author | Franquet, Alexis | |
dc.contributor.author | Detavernier, Christophe | |
dc.contributor.author | Dendooven, Jolien | |
dc.date.accessioned | 2022-10-12T02:49:49Z | |
dc.date.available | 2022-10-12T02:49:49Z | |
dc.date.issued | 2022-SEP 21 | |
dc.identifier.issn | 0897-4756 | |
dc.identifier.other | WOS:000861669700001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40554 | |
dc.source | WOS | |
dc.title | Atomic Layer Deposition of Ruthenium Dioxide Based on Redox Reactions between Alcohols and Ruthenium Tetroxide | |
dc.type | Journal article | |
dc.type | Journal article (pre-print) | |
dc.contributor.imecauthor | Franquet, Alexis | |
dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
dc.identifier.doi | 10.1021/acs.chemmater.2c02292 | |
dc.source.numberofpages | 13 | |
dc.source.peerreview | yes | |
dc.source.journal | CHEMISTRY OF MATERIALS | |
imec.availability | Under review |
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