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Scalable Nano-Opto-Electromechanical Systems in Silicon Photonics

dc.contributor.authorQuack, Niels
dc.contributor.authorTakabayashi, Alain Yuji
dc.contributor.authorSattari, Hamed
dc.contributor.authorEdinger, Pierre
dc.contributor.authorGylfason, Kristinn B.
dc.contributor.authorJo, Geahun
dc.contributor.authorNiklaus, Frank
dc.contributor.authorVerheyen, Peter
dc.contributor.authorJezzini, Moises
dc.contributor.authorKhan, Umar
dc.contributor.authorZand, Iman
dc.contributor.authorBogaerts, Wim
dc.date.accessioned2022-11-07T02:55:17Z
dc.date.available2022-11-07T02:55:17Z
dc.date.issued2021
dc.identifier.issn2374-0140
dc.identifier.otherWOS:000866488100167
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40688
dc.sourceWOS
dc.titleScalable Nano-Opto-Electromechanical Systems in Silicon Photonics
dc.typeProceedings paper
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorKhan, Umar
dc.contributor.imecauthorZand, Iman
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecVerheyen, Peter::0000-0002-8245-9442
dc.contributor.orcidimecZand, Iman::0000-0001-9857-7331
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.identifier.doi10.1109/IPC48725.2021.9593009
dc.identifier.eisbn978-1-6654-1601-6
dc.source.numberofpages2
dc.source.peerreviewyes
dc.source.conferenceAnnual Conference of the IEEE-Photonics-Society (IPC)
dc.source.conferencedateOCT 18-21, 2021
imec.availabilityUnder review


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220.500.12860/40688.22023-01-17T10:18:40Zvalidation by library/open access desk
120.500.12860/40688*2022-11-07T02:55:17Z

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