dc.contributor.author | Claessens, Niels | |
dc.contributor.author | Khan, Zamran Zahoor | |
dc.contributor.author | Rahnemaihaghighi, Negin | |
dc.contributor.author | Delabie, Annelies | |
dc.contributor.author | Vantomme, Andre | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Meersschaut, Johan | |
dc.date.accessioned | 2022-12-15T12:43:50Z | |
dc.date.available | 2022-11-12T03:03:40Z | |
dc.date.available | 2022-12-15T12:43:50Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 2045-2322 | |
dc.identifier.other | WOS:000873838100042 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40723.2 | |
dc.source | WOS | |
dc.title | Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry | |
dc.type | Journal article | |
dc.contributor.imecauthor | Claessens, Niels | |
dc.contributor.imecauthor | Khan, Zamran Zahoor | |
dc.contributor.imecauthor | Rahnemaihaghighi, Negin | |
dc.contributor.imecauthor | Delabie, Annelies | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Meersschaut, Johan | |
dc.contributor.orcidimec | Claessens, Niels::0000-0002-8863-9532 | |
dc.contributor.orcidimec | Delabie, Annelies::0000-0001-9739-7419 | |
dc.contributor.orcidimec | Meersschaut, Johan::0000-0003-2467-1784 | |
dc.identifier.doi | 10.1038/s41598-022-22645-8 | |
dc.source.numberofpages | 8 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 17770 | |
dc.source.endpage | na | |
dc.source.journal | SCIENTIFIC REPORTS | |
dc.identifier.pmid | MEDLINE:36272993 | |
dc.source.issue | 1 | |
dc.source.volume | 12 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | This work was supported by the European Union's Horizon 2020 research and innovation programme [grant number 824096-RADIATE] and by the Research Foundation-Flanders (FWO) [grant number 1S45421N]. | |