Publication:
Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry
Loading...
Journal
Abstract
Description
Metrics
Downloads
144 since deposited on 2022-11-12
22last month
3last week
Acq. date: 2026-01-09
Views
1419 since deposited on 2022-11-12
1last month
1last week
Acq. date: 2026-01-09
Citations
Metrics
Downloads
144 since deposited on 2022-11-12
22last month
3last week
Acq. date: 2026-01-09
Views
1419 since deposited on 2022-11-12
1last month
1last week
Acq. date: 2026-01-09
Citations