Publication:

Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry

Date

2022
Journal article
https://doi.org/10.1038/s41598-022-22645-8
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Author(s)

Claessens, Niels  
;
Khan, Zamran Zahoor  
;
Rahnemaihaghighi, Negin  
;
Delabie, Annelies  
;
Vantomme, Andre
;
Vandervorst, Wilfried  
;
Meersschaut, Johan  

Journal

SCIENTIFIC REPORTS

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