Publication:

Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry

Date

2022
Journal article
https://doi.org/10.1038/s41598-022-22645-8
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dc.contributor.authorClaessens, Niels
dc.contributor.authorKhan, Zamran Zahoor
dc.contributor.authorRahnemaihaghighi, Negin
dc.contributor.authorDelabie, Annelies
dc.contributor.authorVantomme, Andre
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMeersschaut, Johan
dc.contributor.imecauthorClaessens, Niels
dc.contributor.imecauthorKhan, Zamran Zahoor
dc.contributor.imecauthorRahnemaihaghighi, Negin
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.orcidimecClaessens, Niels::0000-0002-8863-9532
dc.contributor.orcidimecDelabie, Annelies::0000-0001-9739-7419
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.date.accessioned2022-12-15T12:43:50Z
dc.date.available2022-11-12T03:03:40Z
dc.date.available2022-12-15T12:43:50Z
dc.date.issued2022
dc.description.wosFundingTextThis work was supported by the European Union's Horizon 2020 research and innovation programme [grant number 824096-RADIATE] and by the Research Foundation-Flanders (FWO) [grant number 1S45421N].
dc.identifier.doi10.1038/s41598-022-22645-8
dc.identifier.issn2045-2322
dc.identifier.pmidMEDLINE:36272993
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40723
dc.publisherNATURE PORTFOLIO
dc.source.beginpage17770
dc.source.endpagena
dc.source.issue1
dc.source.journalSCIENTIFIC REPORTS
dc.source.numberofpages8
dc.source.volume12
dc.subject.keywordsION-BEAM ANALYSIS
dc.title

Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry

dc.typeJournal article
dspace.entity.typePublication
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