Publication:
Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry
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Acq. date: 2026-05-16
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244 since deposited on 2022-11-12
19last month
4last week
Acq. date: 2026-05-16
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1419 since deposited on 2022-11-12
Acq. date: 2026-05-16
Citations