Publication:

Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry

Date

2022
Journal article
https://doi.org/10.1038/s41598-022-22645-8
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 2.21 MB

Author(s)

Claessens, Niels  
;
Khan, Zamran Zahoor  
;
Rahnemaihaghighi, Negin  
;
Delabie, Annelies  
;
Vantomme, Andre
;
Vandervorst, Wilfried  
;
Meersschaut, Johan  

Journal

SCIENTIFIC REPORTS

Abstract

Description

Statistics

Downloads

184 since deposited on 2022-11-12
27last month
5last week
Acq. date: 2026-02-24

Views

1419 since deposited on 2022-11-12
Acq. date: 2026-02-24

Citations

Statistics

Downloads

184 since deposited on 2022-11-12
27last month
5last week
Acq. date: 2026-02-24

Views

1419 since deposited on 2022-11-12
Acq. date: 2026-02-24

Citations