Publication:
Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry
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1418 since deposited on 2022-11-12
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128 since deposited on 2022-11-12
25last month
6last week
Acq. date: 2025-12-15
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1418 since deposited on 2022-11-12
Acq. date: 2025-12-15
Citations