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Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry
dc.contributor.author | Claessens, Niels | |
dc.contributor.author | Khan, Zamran Zahoor | |
dc.contributor.author | Haghighi, Negin Rahnemai | |
dc.contributor.author | Delabie, Annelies | |
dc.contributor.author | Vantomme, Andre | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Meersschaut, Johan | |
dc.date.accessioned | 2022-11-12T03:03:40Z | |
dc.date.available | 2022-11-12T03:03:40Z | |
dc.date.issued | 2022-OCT 22 | |
dc.identifier.issn | 2045-2322 | |
dc.identifier.other | WOS:000873838100042 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40723 | |
dc.source | WOS | |
dc.title | Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry | |
dc.type | Journal article | |
dc.contributor.imecauthor | Claessens, Niels | |
dc.contributor.imecauthor | Khan, Zamran Zahoor | |
dc.contributor.imecauthor | Haghighi, Negin Rahnemai | |
dc.contributor.imecauthor | Delabie, Annelies | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Meersschaut, Johan | |
dc.contributor.orcidimec | Claessens, Niels::0000-0002-8863-9532 | |
dc.contributor.orcidimec | Delabie, Annelies::0000-0001-9739-7419 | |
dc.contributor.orcidimec | Meersschaut, Johan::0000-0003-2467-1784 | |
dc.identifier.doi | 10.1038/s41598-022-22645-8 | |
dc.source.numberofpages | 8 | |
dc.source.peerreview | yes | |
dc.source.journal | SCIENTIFIC REPORTS | |
dc.identifier.pmid | MEDLINE:36272993 | |
dc.source.issue | 1 | |
dc.source.volume | 12 | |
imec.availability | Under review |
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