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Integration challenges in sub-0.25μm CMOS-based technologies

dc.contributor.authorBadenes, Gonçal
dc.contributor.authorDeferm, Ludo
dc.date.accessioned2021-10-14T12:40:00Z
dc.date.available2021-10-14T12:40:00Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4081
dc.sourceIIOimport
dc.titleIntegration challenges in sub-0.25μm CMOS-based technologies
dc.typeJournal article
dc.contributor.imecauthorDeferm, Ludo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage861
dc.source.endpage871
dc.source.journalMicroelectronics Journal
dc.source.issue11_12
dc.source.volume31
imec.availabilityPublished - open access


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