Show simple item record

A new dummy-free shallow trench isolation concept for mixed-signal applications

dc.contributor.authorBadenes, Gonçal
dc.contributor.authorRooyackers, Rita
dc.contributor.authorAugendre, Emmanuel
dc.contributor.authorVandamme, Ewout
dc.contributor.authorPerello, Carles
dc.contributor.authorHeylen, Nancy
dc.contributor.authorGrillaert, Joost
dc.contributor.authorDeferm, Ludo
dc.date.accessioned2021-10-14T12:40:01Z
dc.date.available2021-10-14T12:40:01Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4082
dc.sourceIIOimport
dc.titleA new dummy-free shallow trench isolation concept for mixed-signal applications
dc.typeJournal article
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorDeferm, Ludo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage3287
dc.source.endpage3282
dc.source.journalJournal of the Electrochemical Society
dc.source.issue10
dc.source.volume147
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
4050.pdf
Size:
890.0Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record