Show simple item record

Hydrogen passivation of HF last cleaned (100) silicon surfaces investigated by multiple internal reflection infrared spectroscopy

dc.contributor.authorBender, Hugo
dc.contributor.authorVerhaverbeke, Steven
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-09-29T12:39:48Z
dc.date.available2021-09-29T12:39:48Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40
dc.sourceIIOimport
dc.titleHydrogen passivation of HF last cleaned (100) silicon surfaces investigated by multiple internal reflection infrared spectroscopy
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorHeyns, Marc
dc.source.peerreviewno
dc.source.beginpage3128
dc.source.endpage3136
dc.source.journalJournal of the Electrochemical Society
dc.source.issue11
dc.source.volume141
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record