dc.contributor.author | Verreck, Devin | |
dc.contributor.author | Arreghini, Antonio | |
dc.contributor.author | Van den Bosch, Geert | |
dc.contributor.author | Rosmeulen, Maarten | |
dc.date.accessioned | 2023-06-30T13:17:23Z | |
dc.date.available | 2023-01-23T03:17:50Z | |
dc.date.available | 2023-06-30T13:17:23Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 0038-1101 | |
dc.identifier.other | WOS:000900139700007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41017.2 | |
dc.source | WOS | |
dc.title | An inner gate as enabler for vertical pitch scaling in macaroni channel gate-all-around 3-D NAND flash memory | |
dc.type | Journal article | |
dc.contributor.imecauthor | Verreck, Devin | |
dc.contributor.imecauthor | Arreghini, Antonio | |
dc.contributor.imecauthor | Van den Bosch, Geert | |
dc.contributor.imecauthor | Rosmeulen, Maarten | |
dc.contributor.orcidimec | Verreck, Devin::0000-0002-3833-5880 | |
dc.contributor.orcidimec | Arreghini, Antonio::0000-0002-7493-9681 | |
dc.contributor.orcidimec | Van den Bosch, Geert::0000-0001-9971-6954 | |
dc.contributor.orcidimec | Rosmeulen, Maarten::0000-0002-3663-7439 | |
dc.identifier.doi | 10.1016/j.sse.2022.108498 | |
dc.source.numberofpages | 3 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art.: 108498 | |
dc.source.endpage | na | |
dc.source.journal | SOLID-STATE ELECTRONICS | |
dc.source.issue | January | |
dc.source.volume | 199 | |
imec.availability | Published - imec | |