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An inner gate as enabler for vertical pitch scaling in macaroni channel gate-all-around 3-D NAND flash memory
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Authors
Verreck, Devin
;
Arreghini, Antonio
;
Van den Bosch, Geert
;
Rosmeulen, Maarten
DOI
10.1016/j.sse.2022.108498
ISSN
0038-1101
Issue
January
Journal
SOLID-STATE ELECTRONICS
Volume
199
Title
An inner gate as enabler for vertical pitch scaling in macaroni channel gate-all-around 3-D NAND flash memory
Publication type
Journal article
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2
20.500.12860/41017.2
*
2023-06-30T13:15:06Z
validation by library/open access desk
1
20.500.12860/41017
2023-01-23T03:17:50Z
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