dc.contributor.author | Sattari, Hamed | |
dc.contributor.author | Takabayashi, Alain Yuji | |
dc.contributor.author | Edinger, Pierre | |
dc.contributor.author | Verheyen, Peter | |
dc.contributor.author | Gylfason, Kristinn B. | |
dc.contributor.author | Bogaerts, Wim | |
dc.contributor.author | Quack, Niels | |
dc.date.accessioned | 2023-04-12T08:43:58Z | |
dc.date.available | 2023-02-10T03:19:27Z | |
dc.date.available | 2023-04-12T08:43:58Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 2708-5260 | |
dc.identifier.other | WOS:000908435100003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41079.2 | |
dc.source | WOS | |
dc.title | Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process | |
dc.type | Journal article | |
dc.contributor.imecauthor | Verheyen, Peter | |
dc.contributor.orcidimec | Verheyen, Peter::0000-0002-8245-9442 | |
dc.date.embargo | 2022-11-01 | |
dc.identifier.doi | 10.1117/1.JOM.2.4.044001 | |
dc.source.numberofpages | 12 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 044001 | |
dc.source.endpage | na | |
dc.source.journal | JOURNAL OF OPTICAL MICROSYSTEMS | |
dc.source.issue | 4 | |
dc.source.volume | 2 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | This project received funding from the European Union's Horizon 2020 research and innovation programme [Grant agreement No. 780283 (MORPHIC)].<SUP>31</SUP> N. Quack acknowledges funding from the Swiss National Science Foundation (SNSF) (Grant No. 157566), and H. Sattari acknowledges funding from the Hasler Foundation (Grant No. 17008). | |