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Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process
dc.contributor.author | Sattari, Hamed | |
dc.contributor.author | Takabayashi, Alain Yuji | |
dc.contributor.author | Edinger, Pierre | |
dc.contributor.author | Verheyen, Peter | |
dc.contributor.author | Gylfason, Kristinn B. | |
dc.contributor.author | Bogaerts, Wim | |
dc.contributor.author | Quack, Niels | |
dc.date.accessioned | 2023-02-10T03:19:27Z | |
dc.date.available | 2023-02-10T03:19:27Z | |
dc.date.issued | 2022-OCT 1 | |
dc.identifier.other | WOS:000908435100003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41079 | |
dc.source | WOS | |
dc.title | Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process | |
dc.type | Journal article | |
dc.contributor.imecauthor | Verheyen, Peter | |
dc.contributor.orcidimec | Verheyen, Peter::0000-0002-8245-9442 | |
dc.identifier.doi | 10.1117/1.JOM.2.4.044001 | |
dc.source.numberofpages | 12 | |
dc.source.peerreview | yes | |
dc.source.journal | JOURNAL OF OPTICAL MICROSYSTEMS | |
dc.source.issue | 4 | |
dc.source.volume | 2 | |
imec.availability | Under review |
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