dc.contributor.author | Pasquali, Mattia | |
dc.contributor.author | Brady-Boyd, Anita | |
dc.contributor.author | Lesniewska, Alicja | |
dc.contributor.author | Carolan, Patrick | |
dc.contributor.author | Conard, Thierry | |
dc.contributor.author | O'Connor, Robert | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Armini, Silvia | |
dc.date.accessioned | 2023-07-24T14:41:43Z | |
dc.date.available | 2023-02-19T03:24:15Z | |
dc.date.available | 2023-07-24T14:41:43Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 1944-8244 | |
dc.identifier.other | WOS:000921980000001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41113.3 | |
dc.source | WOS | |
dc.title | Area-Selective Deposition of AlOx and Al-Silicate for Fully Self- Aligned Via Integration | |
dc.type | Journal article | |
dc.contributor.imecauthor | Pasquali, Mattia | |
dc.contributor.imecauthor | Brady-Boyd, Anita | |
dc.contributor.imecauthor | Lesniewska, Alicja | |
dc.contributor.imecauthor | Carolan, Patrick | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Armini, Silvia | |
dc.contributor.orcidimec | Pasquali, Mattia::0000-0002-1309-1082 | |
dc.contributor.orcidimec | Brady-Boyd, Anita::0000-0002-9257-6837 | |
dc.contributor.orcidimec | Lesniewska, Alicja::0000-0003-3863-065X | |
dc.contributor.orcidimec | Carolan, Patrick::0000-0001-5931-3093 | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
dc.date.embargo | 9999-12-31 | |
dc.identifier.doi | 10.1021/acsami.2c18014 | |
dc.source.numberofpages | 13 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 6079 | |
dc.source.endpage | 6091 | |
dc.source.journal | ACS APPLIED MATERIALS & INTERFACES | |
dc.identifier.pmid | MEDLINE:36649199 | |
dc.source.issue | 4 | |
dc.source.volume | 15 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | The authors acknowledge IMEC's Industrial Affiliation Program on Nano-Interconnects, Imec's p-line for support in the manufacturing of the patterned test wafers. This project has received funding from the European Union's Horizon 2020 Research and Innovation Program under the Marie Sklodow-ska-Curie grant agreement No. 888163. The authors would like to thank Philippe Marien for his support with the manufacturing of planar capacitor wafers, Jan-Willem Clerix for coding the script used to compute the PSDs, and Hans Billington and Inge Manders for their help with the SEM measurements. Gelest and Pegasus are kindly acknowledged for providing the ALD precursors free of charge. | |