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Area-Selective Deposition of AlOx and Al-Silicate for Fully Self- Aligned Via Integration
dc.contributor.author | Pasquali, Mattia | |
dc.contributor.author | Brady-Boyd, Anita | |
dc.contributor.author | Lesniewska, Alicja | |
dc.contributor.author | Carolan, Patrick | |
dc.contributor.author | Conard, Thierry | |
dc.contributor.author | O'Connor, Robert | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Armini, Silvia | |
dc.date.accessioned | 2023-02-19T03:24:15Z | |
dc.date.available | 2023-02-19T03:24:15Z | |
dc.date.issued | 2023-JAN 17 | |
dc.identifier.issn | 1944-8244 | |
dc.identifier.other | WOS:000921980000001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41113 | |
dc.source | WOS | |
dc.title | Area-Selective Deposition of AlOx and Al-Silicate for Fully Self- Aligned Via Integration | |
dc.type | Journal article | |
dc.type | Journal article (pre-print) | |
dc.contributor.imecauthor | Pasquali, Mattia | |
dc.contributor.imecauthor | Brady-Boyd, Anita | |
dc.contributor.imecauthor | Lesniewska, Alicja | |
dc.contributor.imecauthor | Carolan, Patrick | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Armini, Silvia | |
dc.contributor.orcidimec | Pasquali, Mattia::0000-0002-1309-1082 | |
dc.contributor.orcidimec | Brady-Boyd, Anita::0000-0002-9257-6837 | |
dc.contributor.orcidimec | Lesniewska, Alicja::0000-0003-3863-065X | |
dc.contributor.orcidimec | Carolan, Patrick::0000-0001-5931-3093 | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
dc.identifier.doi | 10.1021/acsami.2c18014 | |
dc.source.numberofpages | 13 | |
dc.source.peerreview | yes | |
dc.source.journal | ACS APPLIED MATERIALS & INTERFACES | |
dc.identifier.pmid | MEDLINE:36649199 | |
imec.availability | Under review |
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