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Low temperature selective growth of Ga-doped and Ga-B co-doped germanium source/drain for PMOS devices
dc.contributor.author | Porret, Clement | |
dc.contributor.author | Rengo, Gianluca | |
dc.contributor.author | Ayyad, Mustafa | |
dc.contributor.author | Hikavyy, Andriy | |
dc.contributor.author | Rosseel, Erik | |
dc.contributor.author | Langer, Robert | |
dc.contributor.author | Loo, Roger | |
dc.date.accessioned | 2023-02-20T03:21:23Z | |
dc.date.available | 2023-02-20T03:21:23Z | |
dc.date.issued | 2023-APR 1 | |
dc.identifier.issn | 0021-4922 | |
dc.identifier.other | WOS:000923037200001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41116 | |
dc.source | WOS | |
dc.title | Low temperature selective growth of Ga-doped and Ga-B co-doped germanium source/drain for PMOS devices | |
dc.type | Journal article | |
dc.contributor.imecauthor | Porret, Clement | |
dc.contributor.imecauthor | Rengo, Gianluca | |
dc.contributor.imecauthor | Ayyad, Mustafa | |
dc.contributor.imecauthor | Hikavyy, Andriy | |
dc.contributor.imecauthor | Rosseel, Erik | |
dc.contributor.imecauthor | Langer, Robert | |
dc.contributor.imecauthor | Loo, Roger | |
dc.contributor.orcidimec | Hikavyy, Andriy::0000-0002-8201-075X | |
dc.contributor.orcidimec | Langer, Robert::0000-0002-1132-3468 | |
dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
dc.identifier.doi | 10.35848/1347-4065/acb1b9 | |
dc.source.numberofpages | 6 | |
dc.source.peerreview | yes | |
dc.source.journal | JAPANESE JOURNAL OF APPLIED PHYSICS | |
dc.source.issue | SC | |
dc.source.volume | 62 | |
imec.availability | Under review |
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