Publication:

Low temperature selective growth of Ga-doped and Ga-B co-doped germanium source/drain for PMOS devices

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316 since deposited on 2023-02-20
29last month
5last week
Acq. date: 2026-05-19

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1241 since deposited on 2023-02-20
Acq. date: 2026-05-19

Citations