Publication:

Low temperature selective growth of Ga-doped and Ga-B co-doped germanium source/drain for PMOS devices

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Acq. date: 2026-07-18

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346 since deposited on 2023-02-20
28last month
13last week
Acq. date: 2026-07-18

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1241 since deposited on 2023-02-20
Acq. date: 2026-07-18

Citations