Publication:
Low temperature selective growth of Ga-doped and Ga-B co-doped germanium source/drain for PMOS devices
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Acq. date: 2026-03-17
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252 since deposited on 2023-02-20
25last month
13last week
Acq. date: 2026-03-17
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1240 since deposited on 2023-02-20
Acq. date: 2026-03-17
Citations