Publication:

Low temperature selective growth of Ga-doped and Ga-B co-doped germanium source/drain for PMOS devices

Date

2023
Journal article
https://doi.org/10.35848/1347-4065/acb1b9
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Accepted version 665.57 KB

Author(s)

Porret, Clément  
;
Rengo, Gianluca  
;
Ayyad, Mustafa  
;
Hikavyy, Andriy  
;
Rosseel, Erik  
;
Langer, Robert  
;
Loo, Roger  

Journal

JAPANESE JOURNAL OF APPLIED PHYSICS

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288 since deposited on 2023-02-20
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