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Low-k materials engineering from 10 nm technology node and beyond

dc.contributor.authorKrishtab, Mikhail
dc.date.accessioned2023-02-21T12:07:14Z
dc.date.available2023-02-21T12:07:14Z
dc.date.issued2022
dc.identifier.isbnna
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41121
dc.titleLow-k materials engineering from 10 nm technology node and beyond
dc.typePHD thesis
dc.contributor.imecauthorKrishtab, Mikhail
dc.contributor.orcidimecKrishtab, Mikhail::0000-0001-6215-8506
dc.source.peerreviewyes
dc.contributor.thesisadvisorDe Gendt, Stefan
dc.contributor.thesisadvisorAmeloot, Rob
imec.availabilityPublished - imec


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