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Application of focused ion beam for failure analysis

dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-14T12:40:44Z
dc.date.available2021-10-14T12:40:44Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4112
dc.sourceIIOimport
dc.titleApplication of focused ion beam for failure analysis
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.source.peerreviewno
dc.source.beginpage216
dc.source.endpage222
dc.source.journalInformacije MIDEM-Journal of Microelectronics Electronic Components and Materials
dc.source.issue4
dc.source.volume30
imec.availabilityPublished - imec


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