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Ion beams focus on semiconductor devices

dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-14T12:40:45Z
dc.date.available2021-10-14T12:40:45Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4113
dc.sourceIIOimport
dc.titleIon beams focus on semiconductor devices
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage11
dc.source.endpage14
dc.source.journalVacuum Solutions
dc.source.issueMarch_April
imec.availabilityPublished - open access


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