dc.contributor.author | Heller, Rene | |
dc.contributor.author | Klingner, Nico | |
dc.contributor.author | Claessens, Niels | |
dc.contributor.author | Merckling, Clement | |
dc.contributor.author | Meersschaut, Johan | |
dc.date.accessioned | 2023-03-23T15:15:43Z | |
dc.date.available | 2023-03-05T03:29:16Z | |
dc.date.available | 2023-03-09T08:47:17Z | |
dc.date.available | 2023-03-23T15:15:43Z | |
dc.date.issued | 2022-09-26 | |
dc.identifier.issn | 0021-8979 | |
dc.identifier.other | WOS:000932885000002 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41236.3 | |
dc.source | WOS | |
dc.title | Differential evolution optimization of Rutherford backscattering spectra | |
dc.type | Journal article | |
dc.contributor.imecauthor | Claessens, Niels | |
dc.contributor.imecauthor | Merckling, Clement | |
dc.contributor.imecauthor | Meersschaut, Johan | |
dc.contributor.orcidimec | Claessens, Niels::0000-0002-8863-9532 | |
dc.contributor.orcidimec | Merckling, Clement::0000-0003-3084-2543 | |
dc.contributor.orcidimec | Meersschaut, Johan::0000-0003-2467-1784 | |
dc.date.embargo | 2022-10-26 | |
dc.identifier.doi | 10.1063/5.0096497 | |
dc.source.numberofpages | 10 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 165302 | |
dc.source.endpage | 165302 | |
dc.source.journal | JOURNAL OF APPLIED PHYSICS | |
dc.source.issue | 16 | |
dc.source.volume | 132 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | This project has received funding from the European Union's Horizon 2020 research and innovation program under Grant Agreement No. 824096. The support from Johan Desmet, Praveen Dara, and Michiel Jordens at IMEC is greatly acknowledged. The work by C.M. has been supported by the ERC NOTICE GA 864483. The work by N.C. has been supported by the Research Foundation-Flanders (FWO) (Grant No. 1S45421N). | |