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Engineering Strain and Texture in Ferroelectric Scandium-Doped Aluminium Nitride
dc.contributor.author | McMitchell, Sean | |
dc.contributor.author | Walke, Amey | |
dc.contributor.author | Banerjee, Kaustuv | |
dc.contributor.author | Mertens, Sofie | |
dc.contributor.author | Piao, Xiaoyu | |
dc.contributor.author | Mao, Ming | |
dc.contributor.author | Katcko, Kostantine | |
dc.contributor.author | Vellianitis, Georgios | |
dc.contributor.author | Van Dal, Mark | |
dc.contributor.author | Lin, Yu-Ming | |
dc.contributor.author | Van den Bosch, Geert | |
dc.contributor.author | Delhougne, Romain | |
dc.contributor.author | Kar, Gouri Sankar | |
dc.date.accessioned | 2023-07-06T07:43:37Z | |
dc.date.available | 2023-03-16T03:39:16Z | |
dc.date.available | 2023-07-06T07:43:37Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 2637-6113 | |
dc.identifier.other | WOS:000941425500001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41287.2 | |
dc.source | WOS | |
dc.title | Engineering Strain and Texture in Ferroelectric Scandium-Doped Aluminium Nitride | |
dc.type | Journal article | |
dc.contributor.imecauthor | McMitchell, Sean | |
dc.contributor.imecauthor | Walke, Amey | |
dc.contributor.imecauthor | Banerjee, Kaustuv | |
dc.contributor.imecauthor | Mertens, Sofie | |
dc.contributor.imecauthor | Piao, Xiaoyu | |
dc.contributor.imecauthor | Mao, Ming | |
dc.contributor.imecauthor | Katcko, Kostantine | |
dc.contributor.imecauthor | Van den Bosch, Geert | |
dc.contributor.imecauthor | Delhougne, Romain | |
dc.contributor.imecauthor | Kar, Gouri Sankar | |
dc.contributor.orcidimec | Banerjee, Kaustuv::0000-0001-8003-6211 | |
dc.contributor.orcidimec | Mertens, Sofie::0000-0002-1482-6730 | |
dc.contributor.orcidimec | Katcko, Kostantine::0000-0002-0576-8962 | |
dc.contributor.orcidimec | Van den Bosch, Geert::0000-0001-9971-6954 | |
dc.identifier.doi | 10.1021/acsaelm.2c01421 | |
dc.source.numberofpages | 7 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 858 | |
dc.source.endpage | 864 | |
dc.source.journal | ACS APPLIED ELECTRONIC MATERIALS | |
dc.source.issue | 2 | |
dc.source.volume | 5 | |
imec.availability | Published - imec |
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