dc.contributor.author | Van Dongen, Kaat | |
dc.contributor.author | Nye, Rachel | |
dc.contributor.author | Clerix, Jan-Willem | |
dc.contributor.author | Sixt, Claudia | |
dc.contributor.author | De Simone, Danilo | |
dc.contributor.author | Delabie, Annelies | |
dc.date.accessioned | 2023-06-30T14:45:28Z | |
dc.date.available | 2023-04-06T04:02:05Z | |
dc.date.available | 2023-06-30T14:45:28Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 0734-2101 | |
dc.identifier.other | WOS:000952702300001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41429.2 | |
dc.source | WOS | |
dc.title | Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions | |
dc.type | Journal article | |
dc.contributor.imecauthor | Van Dongen, Kaat | |
dc.contributor.imecauthor | Nye, Rachel | |
dc.contributor.imecauthor | Clerix, Jan-Willem | |
dc.contributor.imecauthor | Sixt, Claudia | |
dc.contributor.imecauthor | De Simone, Danilo | |
dc.contributor.imecauthor | Delabie, Annelies | |
dc.contributor.orcidimec | De Simone, Danilo::0000-0003-3927-5207 | |
dc.contributor.orcidimec | Delabie, Annelies::0000-0001-9739-7419 | |
dc.contributor.orcidimec | Clerix, Jan-Willem::0000-0002-2681-4569 | |
dc.date.embargo | 2023-09-23 | |
dc.identifier.doi | 10.1116/6.0002347 | |
dc.source.numberofpages | 14 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art.: 032404 | |
dc.source.endpage | na | |
dc.source.journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | |
dc.source.issue | 3 | |
dc.source.volume | 41 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | The authors acknowledge Inpria Corporation for providing the metal-oxide resist and Peter De Schepper and Sonia Castellanos Ortega from Inpria Corporation for valuable discussions. The authors acknowledge Ilse Hoflijk, Anja Vanleenhove and Thierry Conard from imec for their discussions involving XPS characterization and data analysis. We thank Jorne Domen from KU Leuven for assistance in sample characterization. Jan-Willem Clerix acknowledges funding from The Research Foundation-Flanders (FWO) for a Ph.D. fellowship strategic basic research (Project No. 1SB4321N). | |