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Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions
dc.contributor.author | Van Dongen, Kaat | |
dc.contributor.author | Nye, Rachel A. A. | |
dc.contributor.author | Clerix, Jan-Willem J. | |
dc.contributor.author | Sixt, Claudia | |
dc.contributor.author | De Simone, Danilo | |
dc.contributor.author | Delabie, Annelies | |
dc.date.accessioned | 2023-04-06T04:02:05Z | |
dc.date.available | 2023-04-06T04:02:05Z | |
dc.date.issued | 2023-MAY | |
dc.identifier.issn | 0734-2101 | |
dc.identifier.other | WOS:000952702300001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41429 | |
dc.source | WOS | |
dc.title | Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions | |
dc.type | Journal article | |
dc.contributor.imecauthor | Van Dongen, Kaat | |
dc.contributor.imecauthor | Nye, Rachel A. A. | |
dc.contributor.imecauthor | Clerix, Jan-Willem J. | |
dc.contributor.imecauthor | Sixt, Claudia | |
dc.contributor.imecauthor | De Simone, Danilo | |
dc.contributor.imecauthor | Delabie, Annelies | |
dc.contributor.orcidimec | De Simone, Danilo::0000-0003-3927-5207 | |
dc.contributor.orcidimec | Delabie, Annelies::0000-0001-9739-7419 | |
dc.identifier.doi | 10.1116/6.0002347 | |
dc.source.numberofpages | 14 | |
dc.source.peerreview | yes | |
dc.source.journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | |
dc.source.issue | 3 | |
dc.source.volume | 41 | |
imec.availability | Under review |
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