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Characterization of ultra thin oxynitrides: a general approach

dc.contributor.authorBrijs, Bert
dc.contributor.authorDeleu, Jeroen
dc.contributor.authorConard, Thierry
dc.contributor.authorDe Witte, Hilde
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorNakajima, K.
dc.contributor.authorKimura, K.
dc.contributor.authorGenchev, I.
dc.contributor.authorBermaier, A.
dc.contributor.authorGoergens, L.
dc.contributor.authorNeumaier, P.
dc.contributor.authorDollinger, G.
dc.contributor.authorDöbeli, M.
dc.date.accessioned2021-10-14T12:42:06Z
dc.date.available2021-10-14T12:42:06Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4150
dc.sourceIIOimport
dc.titleCharacterization of ultra thin oxynitrides: a general approach
dc.typeJournal article
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage429
dc.source.endpage434
dc.source.journalNuclear Instruments and Methods B
dc.source.volume161-163
imec.availabilityPublished - open access
imec.internalnotesPaper from IBA-14-ECAART-6 (1999)


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