dc.contributor.author | Ramesh, Siva | |
dc.contributor.author | Rachidi, Sana | |
dc.contributor.author | Donadio, Gabriele Luca | |
dc.contributor.author | Van den Bosch, Geert | |
dc.contributor.author | Rosmeulen, Maarten | |
dc.date.accessioned | 2023-07-07T08:24:23Z | |
dc.date.available | 2023-05-04T19:59:26Z | |
dc.date.available | 2023-07-07T08:24:23Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 2162-8769 | |
dc.identifier.other | WOS:000973371600001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41565.2 | |
dc.source | WOS | |
dc.title | Gate MOSCAP Studies on Electroless Deposited Nickel Boron as Word Line Candidate Metal for Future Scaled 3-D NAND Flash | |
dc.type | Journal article | |
dc.contributor.imecauthor | Ramesh, Siva | |
dc.contributor.imecauthor | Rachidi, Sana | |
dc.contributor.imecauthor | Donadio, Gabriele Luca | |
dc.contributor.imecauthor | Van den Bosch, Geert | |
dc.contributor.imecauthor | Rosmeulen, Maarten | |
dc.contributor.orcidimec | Ramesh, Siva::0000-0002-8473-7258 | |
dc.contributor.orcidimec | Rachidi, Sana::0000-0001-8581-8597 | |
dc.contributor.orcidimec | Van den Bosch, Geert::0000-0001-9971-6954 | |
dc.contributor.orcidimec | Rosmeulen, Maarten::0000-0002-3663-7439 | |
dc.identifier.doi | 10.1149/2162-8777/accb66 | |
dc.source.numberofpages | 7 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 045003 | |
dc.source.endpage | na | |
dc.source.journal | ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY | |
dc.source.issue | 4 | |
dc.source.volume | 12 | |
imec.availability | Published - imec | |