dc.contributor.author | Hoflijk, Ilse | |
dc.contributor.author | Vanleenhove, Anja | |
dc.contributor.author | Vaesen, Inge | |
dc.contributor.author | Zborowski, Charlotte | |
dc.contributor.author | Artyushkova, K. | |
dc.contributor.author | Conard, Thierry | |
dc.date.accessioned | 2023-07-17T12:35:17Z | |
dc.date.available | 2023-06-20T10:33:59Z | |
dc.date.available | 2023-07-17T12:35:17Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 1055-5269 | |
dc.identifier.other | WOS:000810621700001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41832.2 | |
dc.source | WOS | |
dc.title | High energy x-ray photoelectron spectroscopy spectra of Si3N4 measured by Cr K alpha | |
dc.type | Journal article | |
dc.contributor.imecauthor | Hoflijk, Ilse | |
dc.contributor.imecauthor | Vanleenhove, Anja | |
dc.contributor.imecauthor | Vaesen, Inge | |
dc.contributor.imecauthor | Zborowski, Charlotte | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.orcidimec | Hoflijk, I.::0000-0002-8351-3340 | |
dc.contributor.orcidimec | Zborowski, C.::0000-0001-6276-7109 | |
dc.contributor.orcidimec | Vaesen, Inge::0000-0003-3533-4679 | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.identifier.doi | 10.1116/6.0001524 | |
dc.source.numberofpages | 8 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 014013 | |
dc.source.endpage | na | |
dc.source.journal | SURFACE SCIENCE SPECTRA | |
dc.source.issue | 1 | |
dc.source.volume | 29 | |
imec.availability | Published - imec | |