High energy x-ray photoelectron spectroscopy spectra of Si3N4 measured by Cr K alpha

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dc.contributor.author	Hoflijk, I.
dc.contributor.author	Vanleenhove, A.
dc.contributor.author	Vaesen, I.
dc.contributor.author	Zborowski, C.
dc.contributor.author	Artyushkova, K.
dc.contributor.author	Conard, T.
dc.date.accessioned	2023-06-20T10:33:59Z
dc.date.available	2023-06-20T10:33:59Z
dc.date.issued	2022-JUN
dc.identifier.issn	1055-5269
dc.identifier.other	WOS:000810621700001
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/41832
dc.source	WOS
dc.title	High energy x-ray photoelectron spectroscopy spectra of Si3N4 measured by Cr K alpha
dc.type	Journal article
dc.contributor.imecauthor	Hoflijk, I.
dc.contributor.imecauthor	Vanleenhove, A.
dc.contributor.imecauthor	Vaesen, I.
dc.contributor.imecauthor	Zborowski, C.
dc.contributor.imecauthor	Conard, T.
dc.contributor.orcidimec	Hoflijk, I.::0000-0002-8351-3340
dc.contributor.orcidimec	Zborowski, C.::0000-0001-6276-7109
dc.identifier.doi	10.1116/6.0001524
dc.source.numberofpages	8
dc.source.peerreview	yes
dc.source.journal	SURFACE SCIENCE SPECTRA
dc.source.issue	1
dc.source.volume	29
imec.availability	Under review

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Version	Item	Date	Summary
2	20.500.12860/41832.2	2023-07-17T12:31:19Z	validation by library/open access desk
1	20.500.12860/41832*	2023-06-20T10:33:59Z