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Low-loss, low-temperature PVD SiN waveguides

dc.contributor.authorGolshani, Negin
dc.contributor.authorWitters, Thomas
dc.contributor.authorMcGurk, John
dc.contributor.authorDe Heyn, Peter
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorMilenin, Alexey
dc.contributor.authorThiam, Arame
dc.contributor.authorMingardi, Andrea
dc.contributor.authorVerheyen, Peter
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorVan Campenhout, Joris
dc.date.accessioned2023-08-08T08:20:25Z
dc.date.available2023-06-20T10:34:23Z
dc.date.available2023-08-08T08:20:25Z
dc.date.issued2021
dc.identifier.issn1949-2081
dc.identifier.otherWOS:000783824500027
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41846.2
dc.sourceWOS
dc.titleLow-loss, low-temperature PVD SiN waveguides
dc.typeProceedings paper
dc.contributor.imecauthorGolshani, Negin
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorMcGurk, John
dc.contributor.imecauthorDe Heyn, Peter
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorMilenin, Alexey
dc.contributor.imecauthorThiam, Arame
dc.contributor.imecauthorMingardi, Andrea
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.orcidimecDe Heyn, Peter::0000-0003-3523-7377
dc.contributor.orcidimecDe Coster, Jeroen::0000-0001-8614-7000
dc.contributor.orcidimecVerheyen, Peter::0000-0002-8245-9442
dc.contributor.orcidimecWitters, Thomas::0000-0002-8528-9469
dc.contributor.orcidimecDe Coster, Jeroen::0000-0002-4893-0691
dc.contributor.orcidimecMilenin, Alexey::0000-0003-0747-0462
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.identifier.doi10.1109/GFP51802.2021.9673874
dc.identifier.eisbn978-1-6654-2224-6
dc.source.numberofpages2
dc.source.peerreviewyes
dc.source.conference17th IEEE International Conference on Group IV Photonics (GFP)
dc.source.conferencedateDEC 07-10, 2021
dc.source.conferencelocationMalaga
dc.source.journalna
imec.availabilityPublished - imec


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220.500.12860/41846.2*2023-08-08T08:19:25Zvalidation by library/open access desk
120.500.12860/418462023-06-20T10:34:23Z

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