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A BISTABLE SILICON PHOTONIC MEMS PHASE SWITCH FOR NONVOLATILE PHOTONIC CIRCUITS

dc.contributor.authorEdinger, Pierre
dc.contributor.authorTakabayashi, Alain Yuji
dc.contributor.authorErrando-Herranz, Carlos
dc.contributor.authorKhan, Umar
dc.contributor.authorAntony, Cleitus
dc.contributor.authorTalli, Giuseppe
dc.contributor.authorVerheyen, Peter
dc.contributor.authorBogaerts, Wim
dc.contributor.authorQuack, Niels
dc.contributor.authorGylfason, Kristinn B.
dc.date.accessioned2023-08-11T07:42:07Z
dc.date.available2023-06-20T10:34:32Z
dc.date.available2023-08-11T07:42:07Z
dc.date.issued2022
dc.identifier.issn1084-6999
dc.identifier.otherWOS:000784358100253
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41853.2
dc.sourceWOS
dc.titleA BISTABLE SILICON PHOTONIC MEMS PHASE SWITCH FOR NONVOLATILE PHOTONIC CIRCUITS
dc.typeProceedings paper
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.orcidextEdinger, Pierre::0000-0002-7339-6662
dc.contributor.orcidextTakabayashi, Alain Yuji::0000-0002-1654-6636
dc.contributor.orcidextErrando-Herranz, Carlos::0000-0001-7249-7392
dc.contributor.orcidextAntony, Cleitus::0000-0003-0466-8115
dc.contributor.orcidextTalli, Giuseppe::0000-0002-3386-1080
dc.contributor.orcidextBogaerts, Wim::0000-0002-2110-2685
dc.contributor.orcidextQuack, Niels::0000-0001-5189-0929
dc.contributor.orcidimecVerheyen, Peter::0000-0002-8245-9442
dc.date.embargo9999-12-31
dc.identifier.doi10.1109/MEMS51670.2022.9699739
dc.identifier.eisbn978-1-6654-0911-7
dc.source.numberofpages3
dc.source.peerreviewyes
dc.source.beginpage995
dc.source.endpage997
dc.source.conference35th IEEE International Conference on Micro Electro Mechanical Systems Conference (IEEE MEMS)
dc.source.conferencedateJAN 09-13, 2022
dc.source.conferencelocationTokyo
dc.source.journal35th IEEE International Conference on Micro Electro Mechanical Systems Conference (IEEE MEMS)
imec.availabilityPublished - open access
dc.description.wosFundingTextThis work has received funding from the European Union's Horizon 2020 research and innovation programme under grant agreement No 780283 (MORPHIC). We thank Dr. Max Yan for access to measurement equipment and Mikael Bergqvist for assistance with setups.


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