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Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistors
dc.contributor.author | Anand, Utkarsh | |
dc.contributor.author | Ghosh, Tanmay | |
dc.contributor.author | Aabdin, Zainul | |
dc.contributor.author | Vrancken, Nandi | |
dc.contributor.author | Yan, Hongwei | |
dc.contributor.author | Xu, XiuMei | |
dc.contributor.author | Holsteyns, Frank | |
dc.contributor.author | Mirsaidov, Utkur | |
dc.date.accessioned | 2023-06-20T10:38:39Z | |
dc.date.available | 2023-06-20T10:38:39Z | |
dc.date.issued | 2021-MAR 26 | |
dc.identifier.other | WOS:000635462900040 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42012 | |
dc.source | WOS | |
dc.title | Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistors | |
dc.type | Journal article | |
dc.contributor.imecauthor | Vrancken, Nandi | |
dc.contributor.imecauthor | Xu, XiuMei | |
dc.contributor.imecauthor | Holsteyns, Frank | |
dc.contributor.orcidext | Anand, Utkarsh::0000-0003-3914-8435 | |
dc.contributor.orcidext | Ghosh, Tanmay::0000-0003-0532-2407 | |
dc.contributor.orcidext | Yan, Hongwei::0000-0001-5311-7614 | |
dc.contributor.orcidext | Mirsaidov, Utkur::0000-0001-8673-466X | |
dc.contributor.orcidimec | Xu, XiuMei::0000-0002-3356-8693 | |
dc.identifier.doi | 10.1021/acsanm.0c03283 | |
dc.source.numberofpages | 9 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 2664 | |
dc.source.endpage | 2672 | |
dc.source.journal | ACS APPLIED NANO MATERIALS | |
dc.source.issue | 3 | |
dc.source.volume | 4 | |
imec.availability | Under review |
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