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Growth mechanisms of interfacial carbon layers at the epitaxial Al2O3(0001)/Cu(111) interface as application for epitaxial film lift-off
dc.contributor.author | Tsai, Hung-Chieh | |
dc.contributor.author | Marien, Brecht | |
dc.contributor.author | Chancerel, Francois | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Brems, Steven | |
dc.date.accessioned | 2023-07-10T15:19:08Z | |
dc.date.available | 2023-06-26T20:41:51Z | |
dc.date.available | 2023-07-10T15:19:08Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 0734-2101 | |
dc.identifier.other | WOS:000993981100002 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42099.2 | |
dc.source | WOS | |
dc.title | Growth mechanisms of interfacial carbon layers at the epitaxial Al2O3(0001)/Cu(111) interface as application for epitaxial film lift-off | |
dc.type | Journal article | |
dc.contributor.imecauthor | Tsai, Hung-Chieh | |
dc.contributor.imecauthor | Marien, Brecht | |
dc.contributor.imecauthor | Chancerel, Francois | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Brems, Steven | |
dc.contributor.orcidimec | Tsai, Hung-Chieh::0000-0001-6654-4885 | |
dc.contributor.orcidimec | Chancerel, Francois::0000-0003-4512-1634 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.contributor.orcidimec | Brems, Steven::0000-0002-0282-8528 | |
dc.identifier.doi | 10.1116/6.0002568 | |
dc.source.numberofpages | 9 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 042201-1 | |
dc.source.endpage | 042201-9 | |
dc.source.journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | |
dc.source.issue | 4 | |
dc.source.volume | 41 | |
imec.availability | Under review |