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Using dedicated device arrays for the characterization of TDDB in a scaled HK/MG technology

dc.contributor.authorSaraza Canflanca, Pablo
dc.contributor.authorDiaz Fortuny, Javier
dc.contributor.authorVici, Andrea
dc.contributor.authorBury, Erik
dc.contributor.authorDegraeve, Robin
dc.contributor.authorKaczer, Ben
dc.date.accessioned2023-11-22T11:06:10Z
dc.date.available2023-07-15T17:05:31Z
dc.date.available2023-11-22T11:06:10Z
dc.date.issued2023
dc.identifier.issn1541-7026
dc.identifier.otherWOS:001007431500046
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42154.2
dc.sourceWOS
dc.titleUsing dedicated device arrays for the characterization of TDDB in a scaled HK/MG technology
dc.typeProceedings paper
dc.contributor.imecauthorSaraza Canflanca, Pablo
dc.contributor.imecauthorDiaz Fortuny, Javier
dc.contributor.imecauthorVici, Andrea
dc.contributor.imecauthorBury, Erik
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorKaczer, Ben
dc.contributor.orcidimecSaraza Canflanca, Pablo::0000-0003-2155-8305
dc.contributor.orcidimecDiaz Fortuny, Javier::0000-0002-8186-071X
dc.contributor.orcidimecVici, Andrea::0000-0002-3614-9590
dc.contributor.orcidimecBury, Erik::0000-0002-5847-3949
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.identifier.doi10.1109/IRPS48203.2023.10117773
dc.identifier.eisbn978-1-6654-5672-2
dc.source.numberofpages6
dc.source.peerreviewyes
dc.source.conference61st IEEE International Reliability Physics Symposium (IRPS)
dc.source.conferencedateMAR 26-30, 2023
dc.source.conferencelocationMonterey
dc.source.journalna
imec.availabilityPublished - imec
dc.description.wosFundingTextThis work was supported in part by the CyberSecurity Research Flanders with reference number VR20192203.


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220.500.12860/42154.2*2023-11-22T11:03:51Zvalidation by library/open access desk
120.500.12860/421542023-07-15T17:05:31Z

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