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Enabling 3D NAND Trench Cells for Scaled Flash Memories

dc.contributor.authorRachidi, Sana
dc.contributor.authorRamesh, Siva
dc.contributor.authorBreuil, Laurent
dc.contributor.authorTao, Zheng
dc.contributor.authorVerreck, Devin
dc.contributor.authorDonadio, Gabriele Luca
dc.contributor.authorArreghini, Antonio
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorRosmeulen, Maarten
dc.date.accessioned2024-04-10T08:55:10Z
dc.date.available2023-07-28T17:39:46Z
dc.date.available2024-04-10T08:55:10Z
dc.date.issued2023
dc.identifier.issn2330-7978
dc.identifier.otherWOS:001013930200031
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42224.3
dc.sourceWOS
dc.titleEnabling 3D NAND Trench Cells for Scaled Flash Memories
dc.typeProceedings paper
dc.contributor.imecauthorRachidi, Sana
dc.contributor.imecauthorRamesh, Siva
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorTao, Zheng
dc.contributor.imecauthorVerreck, Devin
dc.contributor.imecauthorDonadio, Gabriele Luca
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorRosmeulen, Maarten
dc.contributor.orcidimecRachidi, Sana::0000-0001-8581-8597
dc.contributor.orcidimecRamesh, Siva::0000-0002-8473-7258
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecVerreck, Devin::0000-0002-3833-5880
dc.contributor.orcidimecDonadio, Gabriele Luca::0000-0003-1435-3897
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecRosmeulen, Maarten::0000-0002-3663-7439
dc.identifier.doi10.1109/IMW56887.2023.10145992
dc.identifier.eisbn978-1-6654-7459-7
dc.source.numberofpages4
dc.source.peerreviewyes
dc.source.beginpage121
dc.source.endpage124
dc.source.conference15th IEEE International Memory Workshop (IMW)
dc.source.conferencedateMAY 21-24, 2023
dc.source.conferencelocationMonterey
dc.source.journalN/A
imec.availabilityPublished - imec
dc.description.wosFundingTextThis work was supported by IMEC's Industrial Affiliation Program on Storage Memory devices.


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320.500.12860/42224.3*2024-04-10T08:51:05Zvalidation by library/open access desk
120.500.12860/422242023-07-28T17:39:46Z

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