dc.contributor.author | Kang, Seulki | |
dc.contributor.author | Maruyama, Kotaro | |
dc.contributor.author | Yamazaki, Yuichiro | |
dc.contributor.author | Beggiato, Matteo | |
dc.contributor.author | Veloso, Anabela | |
dc.contributor.author | Lorusso, Gian | |
dc.date.accessioned | 2023-11-29T08:07:02Z | |
dc.date.available | 2023-07-28T17:39:55Z | |
dc.date.available | 2023-11-29T08:07:02Z | |
dc.date.issued | 2023 | |
dc.identifier.isbn | 978-1-5106-6099-1 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:001022962000055 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42232.3 | |
dc.source | WOS | |
dc.title | Advanced high voltage e-beam system combined with an enhanced D2DB for on-device overlay measurement | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Beggiato, Matteo | |
dc.contributor.imecauthor | Veloso, Anabela | |
dc.contributor.imecauthor | Lorusso, Gian | |
dc.contributor.orcidimec | Beggiato, Matteo::0000-0003-0873-9021 | |
dc.identifier.doi | 10.1117/12.2661180 | |
dc.identifier.eisbn | 978-1-5106-6100-4 | |
dc.source.numberofpages | 10 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 124961W | |
dc.source.conference | Conference on Metrology, Inspection, and Process Control XXXVII | |
dc.source.conferencedate | FEB 27-MAR 02, 2023 | |
dc.source.conferencelocation | San Jose | |
dc.source.journal | Proceedings of SPIE | |
dc.source.volume | 12496 | |
imec.availability | Published - imec | |