dc.contributor.author | Marien, Philippe | |
dc.contributor.author | Vega Gonzalez, Victor | |
dc.contributor.author | Choudhury, Subhobroto | |
dc.contributor.author | Radisic, Dunja | |
dc.contributor.author | Decoster, Stefan | |
dc.contributor.author | Kundu, Shreya | |
dc.contributor.author | Hermans, Yannick | |
dc.contributor.author | Kenens, Bart | |
dc.contributor.author | De Coster, Hanne | |
dc.contributor.author | Altamirano Sanchez, Efrain | |
dc.contributor.author | Peter, Antony | |
dc.contributor.author | Sepulveda Marquez, Alfonso | |
dc.contributor.author | Jourdan, Nicolas | |
dc.contributor.author | Batuk, Dmitry | |
dc.contributor.author | Ryckaert, Julien | |
dc.contributor.author | Murdoch, Gayle | |
dc.contributor.author | Park, Seongho | |
dc.contributor.author | Tokei, Zsolt | |
dc.date.accessioned | 2024-05-23T12:05:09Z | |
dc.date.available | 2023-08-07T17:07:23Z | |
dc.date.available | 2024-05-23T12:05:09Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 2380-632X | |
dc.identifier.other | WOS:001027381700017 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42286.2 | |
dc.source | WOS | |
dc.title | Integrating 8nm Self-Aligned Tip-to-Tip to Enable 4-track Standard Cell Architecture as Scaling Booster | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Marien, Philippe | |
dc.contributor.imecauthor | Vega Gonzalez, Victor | |
dc.contributor.imecauthor | Choudhury, Subhobroto | |
dc.contributor.imecauthor | Radisic, Dunja | |
dc.contributor.imecauthor | Decoster, Stefan | |
dc.contributor.imecauthor | Kundu, Shreya | |
dc.contributor.imecauthor | Hermans, Yannick | |
dc.contributor.imecauthor | Kenens, Bart | |
dc.contributor.imecauthor | De Coster, Hanne | |
dc.contributor.imecauthor | Altamirano Sanchez, Efrain | |
dc.contributor.imecauthor | Peter, Antony | |
dc.contributor.imecauthor | Sepulveda Marquez, Alfonso | |
dc.contributor.imecauthor | Jourdan, Nicolas | |
dc.contributor.imecauthor | Batuk, Dmitry | |
dc.contributor.imecauthor | Ryckaert, Julien | |
dc.contributor.imecauthor | Murdoch, Gayle | |
dc.contributor.imecauthor | Park, Seongho | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.orcidimec | Marien, Philippe::0000-0001-5644-4442 | |
dc.contributor.orcidimec | Vega Gonzalez, Victor::0000-0002-4320-0585 | |
dc.contributor.orcidimec | Radisic, Dunja::0009-0006-4655-5417 | |
dc.contributor.orcidimec | Decoster, Stefan::0000-0003-1162-9288 | |
dc.contributor.orcidimec | Kundu, Shreya::0000-0001-8052-7774 | |
dc.contributor.orcidimec | Hermans, Yannick::0000-0002-6973-0795 | |
dc.contributor.orcidimec | Kenens, Bart::0000-0003-2329-5449 | |
dc.contributor.orcidimec | De Coster, Hanne::0000-0002-5968-7703 | |
dc.contributor.orcidimec | Altamirano Sanchez, Efrain::0000-0003-3235-6055 | |
dc.contributor.orcidimec | Peter, Antony::0000-0001-5941-0563 | |
dc.contributor.orcidimec | Sepulveda Marquez, Alfonso::0000-0003-4726-177X | |
dc.contributor.orcidimec | Jourdan, Nicolas::0009-0005-4798-1736 | |
dc.contributor.orcidimec | Batuk, Dmitry::0000-0002-6384-6690 | |
dc.contributor.orcidimec | Murdoch, Gayle::0000-0002-6833-220X | |
dc.contributor.orcidimec | Tokei, Zsolt::0000-0003-3545-3424 | |
dc.identifier.doi | 10.1109/IITC/MAM57687.2023.10154710 | |
dc.identifier.eisbn | 979-8-3503-1097-9 | |
dc.source.numberofpages | 3 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM) | |
dc.source.conferencedate | MAY 22-25, 2023 | |
dc.source.conferencelocation | Dresden | |
dc.source.journal | N/A | |
imec.availability | Published - imec | |