dc.contributor.author | Adelmann, Christoph | |
dc.contributor.author | Soulie, Jean-Philippe | |
dc.contributor.author | Scheerder, Jeroen | |
dc.contributor.author | Fleischmann, Claudia | |
dc.contributor.author | Sankaran, Kiroubanand | |
dc.contributor.author | Pourtois, Geoffrey | |
dc.contributor.author | Swerts, Johan | |
dc.contributor.author | Tokei, Zsolt | |
dc.date.accessioned | 2024-05-27T12:50:44Z | |
dc.date.available | 2023-08-07T17:07:25Z | |
dc.date.available | 2024-05-27T12:50:44Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 2380-632X | |
dc.identifier.other | WOS:001027381700040 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42291.3 | |
dc.source | WOS | |
dc.title | Intermetallic Compounds as Alternatives to Copper for Advanced Interconnect Metallization | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Adelmann, Christoph | |
dc.contributor.imecauthor | Soulie, Jean-Philippe | |
dc.contributor.imecauthor | Fleischmann, Claudia | |
dc.contributor.imecauthor | Sankaran, Kiroubanand | |
dc.contributor.imecauthor | Pourtois, Geoffrey | |
dc.contributor.imecauthor | Swerts, Johan | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | Scheerder, Jeroen | |
dc.contributor.orcidimec | Adelmann, Christoph::0000-0002-4831-3159 | |
dc.contributor.orcidimec | Soulie, Jean-Philippe::0000-0002-5956-6485 | |
dc.contributor.orcidimec | Fleischmann, Claudia::0000-0003-1531-6916 | |
dc.contributor.orcidimec | Sankaran, Kiroubanand::0000-0001-6988-7269 | |
dc.contributor.orcidimec | Pourtois, Geoffrey::0000-0003-2597-8534 | |
dc.contributor.orcidimec | Swerts, Johan::0000-0001-7547-7194 | |
dc.contributor.orcidimec | Tokei, Zsolt::0000-0003-3545-3424 | |
dc.contributor.orcidimec | Scheerder, Jeroen::0000-0002-9301-0392 | |
dc.identifier.doi | 10.1109/IITC/MAM57687.2023.10154839 | |
dc.identifier.eisbn | 979-8-3503-1097-9 | |
dc.source.numberofpages | 3 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM) | |
dc.source.conferencedate | MAY 22-25, 2023 | |
dc.source.conferencelocation | Dresden | |
dc.source.journal | N/A | |
imec.availability | Published - imec | |
dc.description.wosFundingText | This work has been supported by imec's industrial affiliate program on nano-interconnects. | |