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Comprehensive Investigation of Constant Voltage Stress Time-Dependent Breakdown and Cycle-to-Breakdown Reliability in Y-Doped and Si-Doped HfO2 Metal-Ferroelectric-Metal Memory

dc.contributor.authorChang, Ting-Yu
dc.contributor.authorWang, Kuan-Chi
dc.contributor.authorLiu, Hsien-Yang
dc.contributor.authorHseun, Jing-Hua
dc.contributor.authorPeng, Wei-Cheng
dc.contributor.authorRonchi, Nicolo
dc.contributor.authorCelano, Umberto
dc.contributor.authorBanerjee, Kaustuv
dc.contributor.authorVan Houdt, Jan
dc.contributor.authorWu, Tian-Li
dc.date.accessioned2023-12-20T11:39:39Z
dc.date.available2023-08-11T16:46:11Z
dc.date.available2023-09-11T08:00:29Z
dc.date.available2023-12-20T11:39:39Z
dc.date.issued2023
dc.identifier.issn2079-4991
dc.identifier.otherWOS:001038850900001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42325.3
dc.sourceWOS
dc.titleComprehensive Investigation of Constant Voltage Stress Time-Dependent Breakdown and Cycle-to-Breakdown Reliability in Y-Doped and Si-Doped HfO2 Metal-Ferroelectric-Metal Memory
dc.typeJournal article
dc.contributor.imecauthorRonchi, Nicolo
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorBanerjee, Kaustuv
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecRonchi, Nicolo::0000-0002-7961-4077
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecBanerjee, Kaustuv::0000-0001-8003-6211
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.embargo2023-07-19
dc.identifier.doi10.3390/nano13142104
dc.source.numberofpages9
dc.source.peerreviewyes
dc.subject.disciplineElectrical & electronic engineering
dc.source.beginpageArt. 2104
dc.source.endpagena
dc.source.journalNANOMATERIALS
dc.identifier.pmidMEDLINE:37513115
dc.source.issue10
dc.source.volume9
imec.availabilityPublished - open access
dc.description.wosFundingTextThis work was financially supported by the "Advanced Semiconductor Technology Research Center" from The Featured Areas Research Center Program within the framework of the Higher Education Sprout Project by the Ministry of Education (MOE) in Taiwan. This work was also partly supported by the Ministry of Science and Technology, Taiwan, under Grant MOST 111-2634-F-A49-008, 111-2622-8-A49-018-SB, and 112-2636-E-A49-005.


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320.500.12860/42325.3*2023-12-20T11:36:57Zvalidation by library/open access desk
220.500.12860/42325.22023-08-14T07:29:57Zvalidation by imec author
120.500.12860/423252023-08-11T16:46:11Z

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