dc.contributor.author | Sajjadian, Faegheh | |
dc.contributor.author | Galleni, Laura | |
dc.contributor.author | Dorney, Kevin | |
dc.contributor.author | Singh, Dhirendra | |
dc.contributor.author | Holzmeier, Fabian | |
dc.contributor.author | van Setten, Michiel | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Conard, Thierry | |
dc.date.accessioned | 2024-03-12T10:30:30Z | |
dc.date.available | 2023-08-12T17:29:09Z | |
dc.date.available | 2024-03-12T10:30:30Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 0734-2101 | |
dc.identifier.other | WOS:001041157500001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42327.3 | |
dc.source | WOS | |
dc.title | Photoemission spectroscopy on photoresist materials: A protocol for analysis of radiation sensitive materials | |
dc.type | Journal article | |
dc.contributor.imecauthor | Galleni, Laura | |
dc.contributor.imecauthor | Holzmeier, Fabian | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | Sajjadian, Faegheh | |
dc.contributor.imecauthor | Dorney, Kevin | |
dc.contributor.imecauthor | Singh, Dhirendra | |
dc.contributor.imecauthor | van Setten, Michiel | |
dc.contributor.orcidimec | Galleni, Laura::0000-0002-6675-7829 | |
dc.contributor.orcidimec | Holzmeier, Fabian::0000-0001-8749-5330 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.contributor.orcidimec | Dorney, Kevin::0000-0003-2097-6994 | |
dc.contributor.orcidimec | Singh, Dhirendra::0000-0002-8855-0597 | |
dc.contributor.orcidimec | van Setten, Michiel::0000-0003-0557-5260 | |
dc.identifier.doi | 10.1116/6.0002808 | |
dc.source.numberofpages | 14 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 053206 | |
dc.source.endpage | N/A | |
dc.source.journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | |
dc.source.issue | 5 | |
dc.source.volume | 41 | |
imec.availability | Published - imec | |
dc.description.wosFundingText | We would like to express our sincere gratitude to Paul van der Heide and John Petersen for their kind support. K.M.D and D.P.S. acknowledge funding from the European Union's Horizon 2020 Research and Innovation Programme under the Marie Sklodowska-Curie Grant Agreement No.s 101031245 (K.M.D.) and 101032241 (D.P.S.). | |