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Special Section Guest Editorial: Advances in E-Beam Metrology

dc.contributor.authorLorusso, Gian
dc.contributor.authorMack, Chris A.
dc.date.accessioned2023-11-20T08:07:54Z
dc.date.available2023-08-27T17:28:48Z
dc.date.available2023-11-20T08:07:54Z
dc.date.issued2023
dc.identifier.issn1932-5150
dc.identifier.otherWOS:001046441600003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42405.2
dc.sourceWOS
dc.titleSpecial Section Guest Editorial: Advances in E-Beam Metrology
dc.typeEditorial material
dc.contributor.imecauthorLorusso, Gian
dc.identifier.doi10.1117/1.JMM.22.2.021001
dc.source.numberofpages1
dc.source.peerreviewno
dc.source.beginpageArt. 021001
dc.source.endpagena
dc.source.journalJOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
dc.source.issue2
dc.source.volume22
imec.availabilityPublished - imec


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220.500.12860/42405.2*2023-11-20T08:04:39Zvalidation by library/open access desk
120.500.12860/424052023-08-27T17:28:48Z

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