Show simple item record

Ru Stress Assessment by Membrane Wrinkling for Interconnect Applications

dc.contributor.authorFounta, Valeria
dc.contributor.authorSoulie, Jean-Philippe
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorde Vondel, Joris Van
dc.contributor.authorSwerts, Johan
dc.contributor.authorTokei, Zsolt
dc.contributor.authorAdelmann, Christoph
dc.date.accessioned2023-12-18T11:51:27Z
dc.date.available2023-09-03T17:38:58Z
dc.date.available2023-12-18T11:51:27Z
dc.date.issued2023
dc.identifier.issnna
dc.identifier.otherWOS:001004185500092
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42456.2
dc.sourceWOS
dc.titleRu Stress Assessment by Membrane Wrinkling for Interconnect Applications
dc.typeProceedings paper
dc.contributor.imecauthorFounta, Valeria
dc.contributor.imecauthorSoulie, Jean-Philippe
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.orcidimecSoulie, Jean-Philippe::0000-0002-5956-6485
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecSwerts, Johan::0000-0001-7547-7194
dc.contributor.orcidimecTokei, Zsolt::0000-0003-3545-3424
dc.identifier.doi10.1109/EDTM55494.2023.10103023
dc.identifier.eisbn979-8-3503-3252-0
dc.source.numberofpages3
dc.source.peerreviewyes
dc.source.conference7th IEEE Electron Devices Technology and Manufacturing Conference (EDTM)
dc.source.conferencedateMAR 07-10, 2023
dc.source.conferencelocationSeoul
dc.source.journalna
imec.availabilityPublished - imec
dc.description.wosFundingTextThis work was supported by imec's industrial affiliate program on nano-interconnects and the department of Physics and Astronomy at KUL. The authors gratefully acknowledge the contributions of imec's MCA lab for the TEM images. V.F. acknowledges the support of a PhD scholarship from the Fonds Wetenschappelijk Onderzoek - Vlaanderen (FWO).


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record

Version history

VersionItemDateSummary
220.500.12860/42456.2*2023-12-18T11:50:22Zvalidation by library/open access desk
120.500.12860/424562023-09-03T17:38:58Z

*Selected version