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Status and review of two-dimensional carrier and dopant profiling using scanning probe microscopy

dc.contributor.authorDe Wolf, Peter
dc.contributor.authorStephenson, Robert
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorClarysse, Trudo
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T12:50:56Z
dc.date.available2021-10-14T12:50:56Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4292
dc.sourceIIOimport
dc.titleStatus and review of two-dimensional carrier and dopant profiling using scanning probe microscopy
dc.typeJournal article
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage361
dc.source.endpage368
dc.source.journalJ. Vacuum Science and Technology B
dc.source.issue1
dc.source.volumeB18
imec.availabilityPublished - open access
imec.internalnotesPapers from the 5th International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles; 1999


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