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The importance of Cu in new generation process technologies

dc.contributor.authorDeferm, Ludo
dc.date.accessioned2021-10-14T12:51:30Z
dc.date.available2021-10-14T12:51:30Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4299
dc.sourceIIOimport
dc.titleThe importance of Cu in new generation process technologies
dc.typeJournal article
dc.contributor.imecauthorDeferm, Ludo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage233
dc.source.endpage235
dc.source.journalSemiconductor Fabtech
dc.source.issue11
imec.availabilityPublished - open access


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