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Influence of Ti on CoSi2 nucleation

dc.contributor.authorDetavernier, C.
dc.contributor.authorVan Meirhaeghe, R. L.
dc.contributor.authorCardon, F.
dc.contributor.authorMaex, Karen
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBrijs, Bert
dc.date.accessioned2021-10-14T12:54:44Z
dc.date.available2021-10-14T12:54:44Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4338
dc.sourceIIOimport
dc.titleInfluence of Ti on CoSi2 nucleation
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage3170
dc.source.endpage3172
dc.source.journalApplied Physics Letters
dc.source.issue20
dc.source.volume77
imec.availabilityPublished - open access


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