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Scanning probes for nanometer scale characterization of semiconductor structures

dc.contributor.authorHantschel, Thomas
dc.date.accessioned2021-10-14T13:02:57Z
dc.date.available2021-10-14T13:02:57Z
dc.date.issued2000-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4419
dc.sourceIIOimport
dc.titleScanning probes for nanometer scale characterization of semiconductor structures
dc.typePHD thesis
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
imec.availabilityPublished - imec
imec.internalnotesThesis Advisors : Prof. Dr. Ir. Vandervorst and Prof. Dr. L. Hellemans


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