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Organic contamination in the integrated circuit processing: controlled by and for time-of-flight secondary ion mass spectrocopy.

dc.contributor.authorKenens, Conny
dc.date.accessioned2021-10-14T13:08:38Z
dc.date.available2021-10-14T13:08:38Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4469
dc.sourceIIOimport
dc.titleOrganic contamination in the integrated circuit processing: controlled by and for time-of-flight secondary ion mass spectrocopy.
dc.typePHD thesis
dc.source.peerreviewno
dc.contributor.thesisadvisorHellemans, L.
imec.availabilityPublished - imec
imec.internalnotesThesis advisor : Prof. Dr. L. Hellemans and Prof. Dr. Ir. W. Vandervorst


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